Concepedia

Publication | Open Access

Etching of sub-micrometer structures through Stencil

DOIFull Paper Access

29

Citations

14

References

2008

Year

Oscar Vázquez-Mena, M A F van den Boogaart, Katrin Sidler, Kristopher Pataky, Veronica Savu, Juergen Brügger
Microelectronic Engineering

References

YearCitations

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