Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing

John S. Suehle, Richard E. Cavicchi, Michael Gaitan et al. · IEEE Electron Device Letters · 1993 · 333 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Development of chemical sensors using microfabrication and micromachining techniques

Qinghai Wu, kwang-Man Lee, Chung-Chiun Liu · Sensors and Actuators B Chemical · 1993 · 71 citations

Engineering, Chemical Engineering, Manufacturing Engineering +14

Liquid crystal imaging for temperature measurement of electronic devices

K. Azar, J.R. Benson, Vincent P. Manno · 2002 · 38 citations

Engineering, Materials Science, Heat Transfer +14

A thin-film gas detector for semiconductor process gases

C.L. Johnson, K.D. Wise, Johannes W. Schwank · 2003 · 25 citations

Engineering, Electrical Engineering, Materials Science +16

Precision comparison of surface temperature measurement techniques for GaAs ICs

M. Nishiguchi, Masamichi Fujihara, A. Miki et al. · IEEE Transactions on Components Hybrids and Manufacturing Technology · 1993 · 25 citations

Engineering, Electrical Engineering, Microelectronics +16