Publication | Closed Access
Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications
84
Citations
6
References
1996
Year
EngineeringMicrofabricationGas SensorMechanical EngineeringThermal ManagementThermal AnalysisThermal ModelingThermodynamicsElectronic PackagingHeat TransferInstrumentationThermal EngineeringIntegrated Gas-sensor ApplicationsThermal SensorHeat PipeMicroelectronics
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