Materials Science in Semiconductor Processing · 1999 · 68 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAluminum OxidesOptical Thin FilmsOxide SemiconductorsSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsPyrolysisSemiconducting Oxide MaterialsSpray PyrolysisThin Oxide FilmsZinc Oxides
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