Design, fabrication, sensor fusion, and control of a micro X–Y stage media platform for probe-based storage systems - Concepedia

Concepedia

Publication | Closed Access

Design, fabrication, sensor fusion, and control of a micro X–Y stage media platform for probe-based storage systems

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Citations

15

References

2009

Year

Chee Khiang Pang, Yi Lü, Chengchen Li, Jian Chen, Hong Zhu, Jiaping Yang, J. Q. Mou, Guoxiao Guo, Ben M. Chen, Tong Heng Lee

Electrical EngineeringEngineeringSensorsMicrofabricationProbe-based Storage SystemsSensor DesignSensor FusionInstrumentationMicroelectronicsMicro TechnologySensor TechnologyMicro-electromechanical System

References

	Year	Citations

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