A high precision micro/nano CMM using piezoresistive tactile probes

TLDR

The paper reports the development of a micro/nano CMM and introduces design concepts for its positioning stage, probe, and software. The system employs scanning force microscopes, stylus profilometers, optical fixed‑focus sensors, and cantilever probes, with detailed design of positioning stage, probe, software, and probe characterization. A nano‑positioning measuring machine was built, coupled with tactile micro/nano CMM probes to extend its function beyond SFM, and its performance was demonstrated on a test artefact.

Abstract

To satisfy various demands of micro- and nanoscale-dimensional metrology, a coordinate measuring system based on a nano positioning and measuring machine (NMM) has been built. The measuring system is able to perform measurements by using sensors such as scanning force microscopes, stylus profilometers, optical fixed focus sensors and assembled cantilever probes. In recent years, two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In such a way, the function of the device has been expanded from a metrological SFM to a micro/nano CMM. In this paper, the development of the micro/nano CMM is reported. The design ideas concerning the key components of the CMM, such as positioning stage, probe and software, are introduced. The characterization of the probe is described in more detail. Measurements on a typical test artefact have been demonstrated as an example.