Diamond and Related Materials · 2000 · 44 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceInorganic ChemistryMaterials ChemistrySurface ScienceLow-impact MaterialsRadiation Damage In MaterialsFast Atom BombardmentSputter DepositionSputter IonizationSputteringSputtering EffectsSputtering ProcessesSputtering TechniquesSurface Sputtering
17
Reactive ion etching of diamond
Gurtej Sandhu, Whei-Lee Chu · Applied Physics Letters · 1989 · 108 citations
Natural Sciences, Materials Engineering, Materials Science +16