MEMS-based gas flow sensors

Fundamentals of Aerodynamics

AIAA Journal · 2010 · 3.8K citations

Engineering, Aerospace Engineering, Physics +17

Microfluidics-a review

Peter Gravesen, J. Branebjerg, O S Jensen · Journal of Micromechanics and Microengineering · 1993 · 1K citations

Engineering, Bioengineering, Fluid Dynamics +16

Micromachined flow sensors—a review

Nam‐Trung Nguyen · Flow Measurement and Instrumentation · 1997 · 386 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +11

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

Yu‐Hsiang Wang, Chia‐Yen Lee, Che-Ming Chiang · Sensors · 2007 · 198 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +17

A micromachined flow shear-stress sensor based on thermal transfer principles

Chang Liu, Jin-Biao Huang, Zhenjun Zhu et al. · Journal of Microelectromechanical Systems · 1999 · 180 citations · Full text

Engineering, Mechanical Engineering, Heat Transfer +16