Influence of the Ar/O2 ratio on the growth and biaxial alignment of yttria stabilized zirconia layers during reactive unbalanced magnetron sputtering

Microstructural evolution during film growth

I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +17

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

Natural Sciences, Materials Engineering, Materials Science +16

Fundamental structure forming phenomena of polycrystalline films and the structure zone models

P.B. Barna, M. Adamik · Thin Solid Films · 1998 · 728 citations

Natural Sciences, Materials Engineering, Materials Science +16

Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition

I. Petrov, F. Adibi, J. E. Greene et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 193 citations

Natural Sciences, Materials Science, Physics +13

Preparation of biaxially aligned cubic zirconia films on pyrex glass substrates using ion-beam assisted deposition

Neville Sonnenberg, Angela Longo, Michael J. Cima et al. · Journal of Applied Physics · 1993 · 127 citations

Natural Sciences, Materials Engineering, Materials Science +12