Inherently robust micro gyroscope actuated by parametric resonance

Abstract

The sensitivity loss, commonly presented in micro gyroscopes based on harmonic oscillators [1], is overcome by using parametric resonance as an actuation mechanism. This operation has been analytically studied in IEEE- Sensors'05 [2] and preliminary dynamical characterization and experimental setup has been presented in IDETC/CIE- ASME'07 [3]. The device is fabricated using SOI process and in this paper we report complete rate table characterization including off-axis isolation, drift, hysteresis and noise of the micro gyroscope with an additional amplification stage.