Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

<i>The Theory of Sound</i>

Lord Rayleigh, Norman H. Nachtrieb · Physics Today · 1957 · 3.5K citations

Language Studies, Linguistics, Acoustics +9

Thermoelastic damping in micro- and nanomechanical systems

Ron Lifshitz, M. L. Roukes · Physical review. B, Condensed matter · 2000 · 1.2K citations · Full text

Engineering, Mechanical Engineering, Physics +17

Mechanical-thermal noise in micromachined acoustic and vibration sensors

T. B. Gabrielson · IEEE Transactions on Electron Devices · 1993 · 737 citations · Full text

Engineering, Mechanical Engineering, Physics +17

Five parametric resonances in a microelectromechanical system

Kimberly L. Turner, Scott A. Miller, P.G. Hartwell et al. · Nature · 1998 · 462 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +13

Thermal and ambient-induced deflections of scanning force microscope cantilevers

Thomas Thundat, R. J. Warmack, G. Y. Chen et al. · Applied Physics Letters · 1994 · 416 citations

Natural Sciences, Chemistry, Materials Science +17