2002 · 24 citations · 7 references
EngineeringElectrical EngineeringMechanical EngineeringElectromagneticsElectromagnetismMicroelectromechanical SystemsMems DesignMems FabricationMems ModelingMems SimulationMems SwitchesRf MemsFabricationRf Mems FabricationRf Mems SwitchesRf SwitchesSwitch ArchitectureSwitch Fabrication ProcessesSwitch ModelingSwitch Simulation
RF MEMS switches for power applications are discussed in this paper. Mechanical and electromagnetic simulations of a new switch type for power applications are presented, and fabrication aspects are discussed.
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Design of low actuation voltage RF MEMS switch
Sergio Pacheco, L.P.B. Katehi, Clark T.‐C. Nguyen · 2002 · 249 citations