Rapid Communications in Mass Spectrometry · 1988 · 15 citations · 9 references
Natural SciencesChemistryMaterials ScienceAnalytical ChemistryMass Spectrometric AnalysisThin FilmsIonization TechniquesMass SpectrometryPolymer AnalysisChemical SputteringDepth ProfilingSecondary Ion Mass SpectrometrySputteringSputtering ProcessesSputtering TechniquesSuppressionSurface Sputtering
Abstract We have measured the sputtering yields of ammonium chloride and of frozen glycerol films under 8 keV Ar +˙ bombardment using a thin film depth profiling technique. The sputtering yield of ammonium chloride was 34±3 molecules (NH 4 Cl)/ion; for frozen glycerol the sputter yield was 54±9 molecules/ion. The results constrain possible mechanisms of damage suppression in organic secondary ion mass spectrometry.
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