IEEE Transactions on Magnetics · 1991 · 11 citations · 12 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesGap JunctionsMetal-semiconductor ContactsNanoelectronicsQuantum TunnelingSuperconducting Thin FilmsAerospace ApplicationsJosephson JunctionsJosephson TunnelingJunction FabricationLow-stress FilmsRefrigeratorsTunnel JunctionsTunneling Barriers
Niobium carbonitride (NbCN) Josephson circuits can operate over a wider temperature range than either niobium or niobium nitride circuits. Higher operating temperature places NbCN technology more comfortably within the range of closed-cycle refrigerators, a key factor in aerospace applications. Tunnel junctions have been fabricated from NbCN films with transition temperatures up to 18 K. High-quality NbCN tunnel junction fabrication generally requires low stress films with roughness less than the barrier thickness ( approximately=20 AA). Scanning tunneling microscopy was developed as a tool for measuring and optimizing film smoothness. Junctions formed in situ with AlN tunneling barriers show reproducible I-V characteristics. Unlike NbN, NbCN oxidizes readily, enabling junction definition by a modified SNAP process. This SNAP lithography technique successfully produced NbCn/AlN/NbCN junctions with V/sub m/ values (at 3 mV) up to 27 mV.
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On the oxidation and on the superconductivity of niobium
J. Halbritter · Applied Physics A · 1987 · 240 citations
Properties of NbN thin films deposited on ambient temperature substrates
D. D. Bacon, A. T. English, S. Nakahara et al. · Journal of Applied Physics · 1983 · 116 citations