Publication | Closed Access
Three dimensional metallization for vertically integrated circuits
90
Citations
4
References
1997
Year
Materials Science3D Ic ArchitectureWafer Scale ProcessingEngineeringMicrofabricationDimensional MetallizationIntegrated CircuitsElectronic PackagingMicroelectronics3D PrintingInterconnect (Integrated Circuits)
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|---|---|---|
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