Concepedia

A. Intemann

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Publications

2

Citations

86

H-Index

2

Active since

1993

Affiliations

Siemens (Germany)(Current)

A. Intemann is an author at Siemens (Germany) specializing in nitrides thin films, metals, and materials engineering.

Publications per year

1993–1995

2

Publications

2

Film Properties of CVD Titanium Nitride Deposited with Organometallic Precursors at Low Pressure Using Inert Gases, Ammonia, or Remote Activation

A. Intemann, Heinrich Koerner, F. Koch · Journal of The Electrochemical Society · 1993 · 70 citations

, , +14

Deposition of titanium nitride/tungsten layers for application in vertically integrated circuits technology

G. Ruhl, B. Fröschle, Peter Ramm et al. · Applied Surface Science · 1995 · 16 citations

, , +14

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