Mechanism of PEALD-Grown AlN Passivation for AlGaN/GaN HEMTs: Compensation of Interface Traps by Polarization Charges

Abstract

The physical mechanism of passivation of AlGaN/GaN HEMTs by AlN thin film prepared with plasma-enhanced atomic layer deposition (PEALD) is investigated by characterizing <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\hbox{Ni}{-} \hbox{Al}_{2}\hbox{O}_{3}/\hbox{AlN}{-}\hbox{GaN}/\hbox{AlGaN}/\hbox{GaN}$</tex></formula> metal–insulator–semiconductor (MIS) diodes. The dielectric stack <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$ \hbox{Al}_{2}\hbox{O}_{3}/\hbox{AlN}$</tex></formula> (13/2 nm) exhibits similar capability in suppressing the current collapse in AlGaN/GaN HEMTs as the 4-nm PEALD-AlN thin film used in our previous work but delivers much lower vertical leakage to facilitate the capacitance–voltage characterizations. Exceptionally large negative bias ( <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$ &lt; -\hbox{8}\ \hbox{V}$</tex></formula> ) is required to deplete the 2-D electron gas in the MIS diode's <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$C$</tex></formula> – <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$V$</tex></formula> measurement. By virtue of quasi-static <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$C$</tex></formula> – <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$V$</tex></formula> characterization, it is revealed that positive fixed charges of <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\sim\hbox{3.2} \times \hbox{10}^{13}\ \hbox{e}/\hbox{cm}^{2}$</tex></formula> are introduced by the PEALD-AlN. The positive fixed charges are suggested to be polarization charges in the monocrystal-like PEALD-AlN. They can effectively compensate the high-density slow-response acceptor-like interface traps, resulting in effective suppression of current collapse.