Publication | Closed Access
A Back-Wafer Contacted Silicon-On-Glass Integrated Bipolar Process—Part II: A Novel Analysis of Thermal Breakdown
67
Citations
24
References
2004
Year
EngineeringIntegrated CircuitsSilicon On InsulatorThermal ConductivityNovel AnalysisWafer Scale ProcessingAdvanced Packaging (Semiconductors)NanoelectronicsThermal ResistanceThermal AnalysisThermodynamicsElectronic PackagingElectrical EngineeringBias Temperature InstabilitySemiconductor Device FabricationHeat TransferDevice ReliabilityMicroelectronicsBipolar TransistorsMicrofabricationApplied PhysicsThermal BreakdownCircuit ReliabilityThermal EngineeringElectrothermal Parameters
Analytical expressions for the electrothermal parameters governing thermal instability in bipolar transistors, i.e., thermal resistance R/sub TH/, critical temperature T/sub crit/ and critical current J/sub C,crit/, are established and verified by measurements on silicon-on-glass bipolar NPNs. A minimum junction temperature increase above ambient due to selfheating that can cause thermal breakdown is identified and verified to be as low as 10-20/spl deg/C. The influence of internal and external series resistances and the thermal resistance explicitly included in the expressions for T/sub crit/ and J/sub C,crit/ becomes clear. The use of the derived expressions for determining the safe operating area of a device and for extracting the thermal resistance is demonstrated.
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