Publication | Closed Access
A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator
82
Citations
6
References
2000
Year
EngineeringSoft RoboticsMicromachinesMicrofabricationMechanical EngineeringMicroelectromechanical SystemsActuationMicroactuatorMicrofluidicsMicromachined Silicon ValveMicro-electromechanical SystemMicroelectronics
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