High-Density Arrays of Valves and Interconnects for Liquid Switching

Abstract

We describe a process for the fabrication of high-density arrays of valves designed for switching liquids. To make small valves capable of opening and closing large orifices for liquid flow requires a flexible movable membrane. We use silicone rubber, because it is elastomeric, makes good seals, and can be spin-coated. Aow channels are defined by a sacrificial photoresist The behavior of individual valves is mea sured, and a model describing the flow is presented. Valve arrays at densities up to 16 valves/cm2 have been demonstrated.