Concepedia

Wafer-Scale Laser Lithography: I. Pyrolytic Deposition Of Metal Microstructures

Irving P. Herman, Roderick A. Hyde, Bruce M. McWilliams, Andrew H. Weisberg, Lowell L. Wood

MRS Proceedings · 1982 · 24 citations · 10 references

DOI

Concepts

References

10

<i>Molecular Theory of Gases and Liquids</i>

Joseph O. Hirschfelder, C. F. Curtiss, R. Byron Bird · Physics Today · 1955 · 11.4K citations

, , +14

Molecular theory of gases and liquids

Robert L. Scott · Journal of Chemical Education · 1955 · 3.9K citations

, , +5

Temperature distributions produced in semiconductors by a scanning elliptical or circular cw laser beam

Y. I. Nissim, A. Lietoila, R. B. Gold et al. · Journal of Applied Physics · 1980 · 273 citations

, , +16

Temperature profiles induced by a scanning cw laser beam

John Moody, R. Hendel · Journal of Applied Physics · 1982 · 238 citations

, , +17

Laser microphotochemistry for use in solid-state electronics

D. J. Ehrlich, Richard M. Osgood, Thomas F. Deutsch · IEEE Journal of Quantum Electronics · 1980 · 180 citations

, , +17