Thin Solid Films · 2001 · 32 citations · 16 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsAmorphous SemiconductorsPlasma StabilitySemiconductor Device MaterialsSemiconductor ReliabilitySilicon MaterialsThin-film TransistorsAmorphous Semiconductor FilmsAmorphous SiliconAmorphous Silicon Thin-film TransistorsSiliconThin-film Semiconductors
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S. C. Deane, Ralf B. Wehrspohn, M. J. Powell · Physical review. B, Condensed matter · 1998 · 101 citations