Optics Letters · 2006 · 37 citations · 3 references
Natural SciencesPhysicsBiomedical OpticsMachine VisionOpticsLens SystemsX-ray OpticsImaging System CalibrationOptical AlignmentOptical System AlignmentSoft X-ray OpticsWavefront SensingX-ray Beamline OpticsX-ray Optics AlignmentX-ray Optics Calibration
We present what we believe to be the first automatic alignment of a synchrotron beamline by the Hartmann technique. Experiments were performed, in the soft-x-ray range (E=3 keV, lambda=0.414 nm), by using a four-actuator Kirkpatrick-Baez (KB) active optic. A system imaging the KB focal spot and a soft-x-ray Hartmann wavefront sensor were used alternatively to control the KB optic. The beam corrected with the help of the imaging system was used to calibrate the wavefront sensor. With both closed loops, we focused the beam into a 6.8 microm x 9 microm FWHM focal spot.
3
Hartmann wave-front measurement at 134 nm with λ_EUV/120 accuracy
Pascal Mercère, Philippe Zeitoun, Mourad Idir et al. · Optics Letters · 2003 · 95 citations
Natural Sciences, Physics, Optics +15
H. A. Padmore, Malcolm R. Howells, Steven C. Irick et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 25 citations
An in situ scanning-slit alignment system for Kirkpatrick–Baez optics
Patrick Naulleau, Phil Batson, Paul Denham et al. · Optics Communications · 2002 · 11 citations