2002 · 19 citations · 5 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationDevice ModelingIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationMicrowave Integrated CircuitsIntegrated Passive ComponentsMicrowave ModelingParasitic EffectsParasitic Element ModelingParasitic ElementsPassive Component ModelingSiliconSilicon Passivation
As the first step in the development of coplanar SiGe MMIC's, modelling and experimental results on passive components are presented. The investigations demonstrate that parasitic effects induced by passivation of high-resistivity silicon substrates play an important role. Efficient CAD tools are developed and verified by comparison with measurements.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
5
Silicon as a microwave substrate
A.C. Reyes, Samir El‐Ghazaly, S. Dorn et al. · 2002 · 69 citations
Silicon Monolithic Millimeterwave Integrated Circuits
P. Russer · 1991 · 21 citations