Evidence for a deep electron trap and charge compensation in separation by implanted oxygen oxides

Abstract

The authors present direct evidence for the creation of deep electron traps in SIMOX (separation by implantation of oxygen) buried oxides. In addition, they present combined electrical and electron spin resonance evidence which demonstrates that at least some positively charged paramagnetic E' centers are compensated by negatively charged centers. Finally, they present evidence which strongly suggests that a substantial fraction of the deep electron traps are coupled to E' centers.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>