Sensors and Actuators A Physical · 2003 · 17 citations · 13 references
PhotonicsOptical MaterialsEngineeringMicrofabricationOptical PropertiesFiber Optic SensingFiber OpticsMicro-optical ComponentFiber OpticDwdm Applications
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A study of the static characteristics of a torsional micromirror
Xuming Zhang, F.S. Chau, Chenggen Quan et al. · Sensors and Actuators A Physical · 2001 · 200 citations
A Flat High-Frequency Scanning Micromirror
Robert A. Conant, Julia Nee, K.Y. Lau et al. · 2000 · 157 citations · Full text
Coupling and conversion coefficients for optical modes
H. Kogelnik · Medical Entomology and Zoology · 1964 · 133 citations
A fiber connectorized MEMS variable optical attenuator
Bradley P. Barber, C.R. Giles, V. Askyuk et al. · IEEE Photonics Technology Letters · 1998 · 123 citations