MRS Proceedings · 1993 · 13 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsEpitaxial GrowthSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesSubstrate PreparationDeposition TechniquesFilm Growth MechanismsThin-film Growth Mechanisms
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