35.3: <i>Distinguished Paper</i> : A Novel Self‐Aligned Top‐Gate Oxide TFT for AM‐OLED Displays

Narihiro Morosawa, Yoshihiro Ohshima, Mitsuo Morooka, Toshiaki Arai, Tatsuya Sasaoka

SID Symposium Digest of Technical Papers · 2011 · 58 citations · 8 references

Abstract

Abstract We developed a novel self‐aligned top‐gate oxide TFT for AM‐OLED displays. Our developed Al reaction method to obtain source/drain regions is effective to fabricate a short channel and highly reliable TFT. A 9.9‐inch diagonal qHD AM‐OLED display was demonstrated to provide applicable solution for a large‐sized and ultra‐high definition OLED mass production.

References

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