A chemical micro analysis system for the measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence

Micro-liquid flow sensor

Theo Lammerink, Niels R. Tas, M. Elwenspoek et al. · Sensors and Actuators A Physical · 1993 · 199 citations · Full text

Engineering, Sensors, Microfabrication +5

Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors

Peter Eriksson, J. Y. Andersson, Göran Stemme · Journal of Microelectromechanical Systems · 1997 · 159 citations

Engineering, Silicon On Insulator, Thermal Conductance +20

Surface micromachined pressure transducers

H. Guckel · Sensors and Actuators A Physical · 1991 · 129 citations

Engineering, Micromachines, Microfabrication +6

Polysilicon as a material for microsensor applications

P. Kopystynski · Sensors and Actuators A Physical · 1992 · 123 citations

Materials Science, Sensor Technology, Engineering +3

A silicon flow cell for optical detection in miniaturized total chemical analysis systems

Elisabeth Verpoorte, A. Manz, Hans Lüdi et al. · Sensors and Actuators B Chemical · 1992 · 107 citations · Full text

Photonic Sensor, Optical Detection, Microscopy +9