Materials science forum · 2000 · 14 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsSemiconductor MaterialsChemical Vapor DepositionEtching ProcessesMicrostructure ControlSemiconductor Crystal GrowthSemiconductor Device MaterialsThermal Properties Of CeramicsCeramic EtchingEtch MechanismsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Etching