The Effect of Doping Concentration and Conductivity Type on Preferential Etching of 4H-SiC by Molten KOH

Etching of Silicon in NaOH Solutions: II . Electrochemical Studies of n‐Si(111) and (100) and Mechanism of the Dissolution

P. Allongue, H. Gerischer · Journal of The Electrochemical Society · 1993 · 242 citations

Engineering, Materials Engineering, Materials Science +17

Rectifying Semi-Conductor Contacts

H.K. Henisch, Herbert F. Mataré · Journal of The Electrochemical Society · 1958 · 153 citations

Bias‐Dependent Etching of Silicon in Aqueous  KOH

O. J. Glembocki, Robert E. Stahlbush, Micha Tomkiewicz · Journal of The Electrochemical Society · 1985 · 138 citations

Natural Sciences, Chemistry, Materials Science +17

Laser‐Assisted Photoelectrochemical Etching of n‐type Beta ‐ SiC

Joseph Shor, X. G. Zhang, Richard M. Osgood · Journal of The Electrochemical Society · 1992 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +17

Photoelectrochemical conductivity selective etch stops for SiC

Joseph Shor, Richard M. Osgood, A. D. Kurtz · Applied Physics Letters · 1992 · 53 citations

Engineering, Electrical Engineering, Materials Science +17