Shield-based microwave on-wafer device measurements

Abstract

This paper introduces a shielding technique for use with microwave on-wafer device characterization. This results in a shield-based test fixture, which offers many advantages compared to conventional structures. Among others, the test fixture offers full scalability and very low cost, high measuring accuracy, mitigation of leakage problems associated with lossy substrates, and a large measuring realism. The performance of the shield-based method is demonstrated with measurements on test structures fabricated in low-cost silicon processes.