Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures

Abstract

Patterned chips: Organic self-assembled monolayers on Si–SiO2 surfaces are patterned with an electric discharge between a patterning tip and the silicon substrate (see picture). The method allows rapid patterning with simple equipment on planar, curved, and textured surfaces. It is used in the fabrication of microfluidic structures for microchip-based mass spectrometric drug analysis.