X-ray ptychographic computed tomography at 16 nm isotropic 3D resolution

Mirko Holler, Ana Díaz, Manuel Guizar‐Sicairos, +7

Scientific Reports

Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates

Christian Dávid, Sergey Gorelick, Simon Rutishauser, +12

Scientific Reports

Ultra-high resolution zone-doubled 
diffractive X-ray optics for the multi-keV regime

Joan Vila‐Comamala, Sergey Gorelick, Elina Färm, +6

Optics Express

X-ray SpectroscopyEngineeringMicroscopyMulti-kev RegimeX-ray Fluorescence +19

Selective-Area Atomic Layer Deposition Using Poly(methyl methacrylate) Films as Mask Layers

Elina Färm, Marianna Kemell, Mikko Ritala, +1

The Journal of Physical Chemistry C

EngineeringMask LayersSurface NanotechnologyThin Film Process TechnologyChemistry +15

Surface modification of thermoplastics by atomic layer deposition of Al2O3 and TiO2 thin films

Marianna Kemell, Elina Färm, Mikko Ritala, +1

European Polymer Journal

Materials ScienceChemical EngineeringEngineeringSurface ScienceSurface Engineering +8

Selective-Area Atomic Layer Deposition Using Poly(vinyl pyrrolidone) as a Passivation Layer

Elina Färm, Marianna Kemell, Eero Santala, +2

Journal of The Electrochemical Society

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringPvp Films +11

Selective-area atomic layer deposition with microcontact printed self-assembled octadecyltrichlorosilane monolayers as mask layers

Elina Färm, Marianna Kemell, Mikko Ritala, +1

Thin Solid Films

Materials ScienceEngineeringThin-film FabricationMicrofabricationSelf-assembly +7

Self‐Assembled Octadecyltrimethoxysilane Monolayers Enabling Selective‐Area Atomic Layer Deposition of Iridium

Elina Färm, Marianna Kemell, Mikko Ritala, +1

Chemical Vapor Deposition

EngineeringMolecular Self-assemblySurface NanotechnologyChemistryMask Layer +15

High resolution double-sided diffractive optics for hard X-ray microscopy

István Mohácsi, Ismo Vartiainen, Manuel Guizar‐Sicairos, +8

Optics Express

X-ray SpectroscopyEngineeringMicroscopyPolycapillary OpticsX-ray Fluorescence +19

Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography

Joan Vila‐Comamala, Sergey Gorelick, Vitaliy A. Guzenko, +3

Nanotechnology

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyNanomaterials +8