Advances in high κ gate dielectrics for Si and III–V semiconductors

High-κ gate dielectrics: Current status and materials properties considerations

G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.8K citations

Engineering, Band Gap, Semiconductor Device +16

Thermodynamic stability of binary oxides in contact with silicon

K. J. Hubbard, Darrell G. Schlom · Journal of materials research/Pratt's guide to venture capital sources · 1996 · 1.2K citations

Engineering, Physics, Oxide Electronics +6

Epitaxial Cubic Gadolinium Oxide as a Dielectric for Gallium Arsenide Passivation

M. Hong, J. Kwo, A. R. Kortan et al. · Science · 1999 · 419 citations

High ε gate dielectrics Gd2O3 and Y2O3 for silicon

J. Kwo, M. Hong, A. R. Kortan et al. · Applied Physics Letters · 2000 · 269 citations

Semiconductors, Materials Science, Electrical Engineering +15

Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si

J. Kwo, M. Hong, A. R. Kortan et al. · Journal of Applied Physics · 2001 · 262 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +16