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Formation of thermal decomposition cavities in physical vapor transport of silicon carbide

Heat Transfer ProcessEngineeringPhysicsThermal Decomposition CavitiesThermal TransportApplied PhysicsSilicon CarbideTransport PhenomenaSemiconductor Device FabricationThermodynamicsHeat TransferPhysical Vapor TransportThermal EngineeringChemical Vapor DepositionCarbide