Microstructure Control of (Ba, Sr)TiO<sub>3</sub> Films for Gigabit Dram

Haibo Shen, David E. Kotecki, Richard J. Murphy, M. Zaitz, R. B. Laibowitz, T. M. Shaw, K. L. Saenger, J. D. Baniecki, G. Beitel, Veronika Klueppel,

MRS Proceedings · 1997 · 10 citations · 8 references

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