Ultra-high precision MEMS accelerometer

Abstract

So far MEMS inertial accelerometers has struggled to reach tactical grade quality only and their bias stability and thermal drift are still obstacles to be overcome for inertial navigation systems. This paper reports on an ultrahigh precision MEMS closed-loop accelerometer recently developed by Colibrys, and the focus is on long term bias stability and thermal drift. The improvement in bias stability comes from MEMS process flow and closed-loop electronics.