Linearized Gimbal-less Two-Axis MEMS Mirrors

Abstract

Gimbal-less Two-Axis Scanning MEMS Mirrors provide ultra low-power and fast optical beam scanning at angles of up to 32° in both axes, while dissipating less than 1 mW of power. Linearized driving scheme and 4-quadrant addressable electrostatic combdrive design gives nearly linear voltage-angle characteristics. Devices are made entirely of single-crystal silicon, resulting in excellent repeatability and reliability. Mirrors from 1mm to 4mm allow users to optimize in their application.