Electrical properties of AlN thin films prepared by ion beam enhanced deposition

The physics of semiconductor devices

H. L. Grubin · IEEE Journal of Quantum Electronics · 1979 · 2.8K citations

Engineering, Materials Science, Physics +12

Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films

K. Tsubouchi, Nobuo Mikoshiba · IEEE Transactions on Sonics and Ultrasonics · 1985 · 492 citations · Full text

Engineering, Electrical Engineering, Materials Science +15

Admittance of p-n junctions containing traps

W.G. Oldham, S. Sankar Naik · Solid-State Electronics · 1972 · 95 citations

Engineering, Electrical Engineering, Materials Science +10

The electrical properties of MIS capacitors with ALN gate dielectrics

Thomas Adam, J. Kolodzey, C.P. Swann et al. · Applied Surface Science · 2001 · 75 citations

Engineering, Electrical Engineering, Materials Science +16

Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials

Stefan Bengtsson, Mats Bergh, M. Choumas et al. · Japanese Journal of Applied Physics · 1996 · 66 citations

Engineering, Materials Engineering, Materials Science +17