Microlens fabricated by the planar process

Abstract

A novel microlens that can be integrated on a laser-diode substrate by the planar process is proposed. It consists of two microcylindrical lenses fabricated by the planar process, and all of their dimensions are less than 100 mu m. One lens is a horizontal focusing lens whose curved shape determines focusing. The other is a vertical focusing lens whose gradient refractive index determines focusing. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>