Microfabrication of wideband distributed beam amplifiers at 220 GHz

Colin D. Joye, J.P. Calame, K. T. Nguyen, D.E. Pershing, Paul B. Larsen, M. Garven, Doewon Park, Robert B. Bass, B. Levush

2011 · 16 citations · 4 references

Concepts

Abstract

Wideband, distributed beam amplifiers are under development at NRL. We report on microfabrication techniques used to construct several types of millimeter wave planar amplifier circuits using Ultraviolet Lithography (UV-LIGA).

References

4