Publication | Closed Access

Enhanced OLED performance upon photolithographic patterning by using an atomic-layer-deposited buffer layer

Materials ScienceEnhanced Oled PerformanceEngineeringPhotolithographic PatterningElectron-beam LithographyBeam LithographyOptical PropertiesApplied PhysicsPattern TransferOptoelectronicsAtomic-layer-deposited Buffer LayerNanolithography Method