Concepedia

Preparation of a 10 nm thick single-crystal silicon membrane self-supporting over a diameter of 1 mm

S. Utteridge, V.A. Sashin, S. A. Canney, Michael J. Ford, D.R. Oliver, M. Vos, E. Weigold

Applied Surface Science · 2000 · 18 citations · 17 references

DOI

Concepts

References

17

Optical Properties of Thin Solid Films

O.S. Heavens · 1965 · 1.2K citations

, , +14

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

, , +15

Wavefunction mapping in collision experiments

I. E. McCarthy, E. Weigold · Reports on Progress in Physics · 1988 · 224 citations

, , +12

Proposed formula for electron inelastic mean free paths based on calculations for 31 materials

Shigeo Tanuma, C. J. Powell, David R. Penn · Surface Science · 1987 · 220 citations

, , +10

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

Arnold Reisman, M. Berkenblit, S. A. Chan et al. · Journal of The Electrochemical Society · 1979 · 208 citations

, , +17