SOI-based fabrication processes of the scanning mirror having vertical comb fingers

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

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A Flat High-Frequency Scanning Micromirror

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Engineering, Mechanical Engineering, Actuators +15

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

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Engineering, Manufacturing Engineering, Mechatronics Engineering +17

Applications of SOI-based optical MEMS

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Engineering, Electrical Engineering, Microelectromechanical Systems +16

Linearization of electrostatically actuated surface micromachined 2-D optical scanner

Hiroshi Toshiyoshi, Wibool Piyawattanametha, Cheng-Ta Chan et al. · Journal of Microelectromechanical Systems · 2001 · 121 citations

Engineering, Electrical Engineering, Mechanical Engineering +17