SOI-based fabrication processes of the scanning mirror having vertical comb fingers - Concepedia

Concepedia

Publication | Open Access

SOI-based fabrication processes of the scanning mirror having vertical comb fingers

DOI Full Paper Access

36

Citations

14

References

2002

Year

Jin‐Ho Lee, Young-Chul Ko, Hee-Moon Jeong, Byoung-So Choi, Jong‐Min Kim, Duk Young Jeon

Sensors and Actuators A Physical

Materials ScienceSoi-based Fabrication ProcessesEngineeringMicroscopyMicrofabricationDigital FabricationMechanical EngineeringApplied PhysicsVertical Comb FingersFabrication Technique

References

	Year	Citations

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