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First observation on the feasibility of scratch formation by pad–particle mixture in CMP process

Materials SciencePad–particle MixtureEngineeringMaterial ProcessingMicrofabricationMechanical EngineeringInterfacial PhenomenaCmp ProcessScratch FormationAdvanced ManufacturingManufacturing EngineeringCeramic PowdersSurface ProcessingMicrostructure