Concepedia

Publication | Closed Access

Porous silicon bulk micromachining for thermally isolated membrane formation

DOI

74

Citations

3

References

1997

Year

Csaba Dücső, É. Vázsonyi, M. Ádám, I.A. Szabó, I. Bársony, Albert van den Berg
Sensors and Actuators A Physical

References

YearCitations

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