High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

J. Cerdà Belmonte, J. Puigcorbé, Jordi Arbiol, A. Vilà, J.R. Morante, N. Sabaté, I. Gràcia, C. Cané

Sensors and Actuators B Chemical · 2005 · 90 citations · 33 references

Concepts

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