Sensors and Actuators B Chemical · 2005 · 90 citations · 33 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsGas SensorsMems CharacterizationMems ResonatorsMems SensorsMicroelectromechanical SensorsMicromachiningGas SensingGas Sensor ApplicationsLow-power Gas SensorsLow-power SensorsMicrofabricated SensorsMicromachined SensorsSensing Applications
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Microhotplate platforms for chemical sensor research
S. Semancik, Richard E. Cavicchi, M. Clayton Wheeler et al. · Sensors and Actuators B Chemical · 2001 · 288 citations