Publication | Closed Access
High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications
88
Citations
33
References
2005
Year
Energy HarvestingEngineeringMicromachinesSuspended Micro-hotplateMicrofabricationGas SensorMechanical EngineeringHeat TransferInstrumentationMicroelectronicsThermal EngineeringThermal SensorMicro-electromechanical SystemMicrofluidics
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