Micro-Raman Scattering Properties of Highly Oriented AlN Films

Abstract

Micro-Raman scattering by highly oriented crystalline aluminum nitride has been measured. Phonon modes in AlN were identified in different scattering geometry configurations and scattering polarizations. The phonon modes revealed that aluminum nitride films are highly oriented with the wurtzite c-axis direction normal to the film plane. The Raman scattering modes are broadened and shifted due to grain boundaries and other defects in the films. The defect scattering was analysed using the phonon confinement model. These results were compared with results obtained from X-ray diffraction powder patterns and high-resolution transmission electron microscopy.