Concepedia

Micro-opto-mechanical vibration sensor integrated on silicon

E. Ollier, P. Philippe, C. Chabrol, P. Mottier

Journal of Lightwave Technology · 1999 · 27 citations · 7 references

Abstract

A new micro-optical vibration sensor has been achieved by combining "integrated optics" and "micromachining" on silicon technologies. The high sensitivity and the wide frequency range have been obtained by using a multimode section in the optical detection circuit. Three prototypes have been installed successfully in an industrial hydroelectric power plant.

References

7

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Engineering, Electrical Engineering, Mechanical Engineering +17

Design And Characterization Of Fiber-Optic Accelerometers

D. R. Miers, D. Prithvi Raj, John W. Berthold · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1988 · 31 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Optical fiber accelerometer based on a silicon micromachined cantilever

Abdelrafik Malki, Pierre Lecoy, Jeanine Marty et al. · Applied Optics · 1995 · 26 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

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Shao-Dong Wu, H. J. Frankena · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 23 citations

Engineering, Mechanical Engineering, Physics +17

Micromechanical cantilever resonators with integrated optical interrogation

Martin Hoffmann, H. Bezzaoui, E. Voges · Sensors and Actuators A Physical · 1994 · 14 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +13