SOI MOSFET effective channel mobility

Abstract

The standard bulk MOSFET definition for effective electric field is modified for SOI devices to account for nonzero electric field at the back oxide interface. The effective channel mobility in fully-depleted n-channel SOI MOSFET's is shown to be independent of applied backgate bias when the modified E/sub eff/ definition is used. The effective channel mobility as a function of E/sub eff/ is also shown to be independent of film thickness for fully-depleted devices.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>